General Specifications

type of instrument

combined confocal (CFM) and atomic force microscope (AFM)

sensor head specifics

AFM: Akiyama probe (quartz tuning fork combined with a mircomachined cantilever) CFM: attoCFM I ext

Modes of Operation

imaging modes

optically detected magnetic resonance (ODMR), AFM, CFM

slope compensation

2 axis scan plane correction

z feedback

AFM: PI feedback loop for amplitude modulation (AM), phase modulation (PM) or frequency modulation (


measured RMS z-noise (constant force @ 4 K, 5 ms pixel time)

< 0.2 nm (expected for attoLIQUID1000), < 0.5 nm (guaranteed for attoLIQUID1000)

z bit resolution @ 4 K

7.6 pm at 2 µm scan range

Confocal Unit


compact and modular design, two or more optical channels standard configuration: 1 excitation chann

key benefits

quick and reliable alignment of each channel, steering mirror for the combined beams exceptional lon

quick-exchange of optical components

beamsplitters, filter mounts for up to 4 filters/ polarizers (1" diameter), optional piezoelectric r

pinhole configuration

two pinholes (fiber apertures), different illumination and collection wavelength possible

pinhole size

dependent on fibers, typically 3 .. 9 µm mode field diameter

compatible LT-objective

LT-APO/VIS, LT-APO/VISIR, LT-APO/NIR(see accessory section for more information)

inspection unit

sample imaging with large field of view: ~54 µm (attoDRY), ~40 µm (attoLIQUID)


excitation wavelength range

400 .. 1000 nm, default 650 nm (others on request)

illumination port specification

FC/ APC-connector for single mode fibers or free-beam configuration


detection mode

e.g. optically detected magnetic resonance (ODMR), luminescence, fluorescence

detection port specification

FC/ APC-connector for single mode fibers or free-beam configuration

Sample Positioning

total travel range

independent degrees of freedom for tip and sample of 2 mm x 3 mm x 2.5 mm (closed loop)

step size

0.05..3 µm @ 300 K, 10..500 nm @ 4 K

fine scan range

50 x 50 x 4.2 µm³ @ 300 K, 30 x 30 x 2 µm³ @ 4 K

closed loop scanning


sample holder

ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts, integrated heater with calibrate

Suitable Operating Conditions

temperature range

1.5 K..300 K (dependent on cryostat); mK compatible setup available on request

magnetic field range

0..15 T+ (dependent on magnet)

operating pressure

designed for He exchange gas (vacuum compatible version down to 1E-6 mbar on request)

Suitable Cooling Systems

titanium housing diameter

48 mm

bore size requirement

designed for a 2" (50.8 mm) cryostat/magnet bore

compatible cryostats

attoDRY1000/1100/2100, attoLIQUID1000/2000/3000/5000

Compatibility with Electronics

scan controller and software

ASC500 (for detailed specifications please see attoCONTROL section)

Options and Upgrades

closed loop scanning & global sample coordinates

interferometric encoders for scan linearization and closed loop sample navigation

ultra-large scan range upgrade

125 x 125 µm² @ 4 K

in-situ inspection optics

tip/sample monitoring via in-situ LT-LED for illumination, mirrors, lenses and CCD camera (outside o

closed loop upgrade for coarse positioners

resistive encoder, range 5 mm, sensor resolution approx. 200 nm, repeatability 1-2 µm

sample holder upgrade

ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts and integrated heater with calibr




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