General Specifications

type of instrument

combined confocal (CFM) and atomic force microscope (AFM)

sensor head specifics


Operation Modes

imaging modes

optically detected magnetic resonance (ODMR), AFM, CFM

slope compensation

2 axis scan plane correction

z feedback



measured RMS z-noise (constant force @ 4 K, 5 ms pixel time)

< 0.2 nm (expected for attoLIQUID1000), < 0.5 nm (guaranteed for attoLIQUID1000)

z bit resolution @ 4 K

7.6 pm at 2 µm scan range

Confocal Unit


compact and modular design, two or more optical channels

key benefits

quick and reliable alignment of each channel, steering mirror for the combined beams exceptional long-term stability

quick-exchange of optical components

beamsplitters, filter mounts for up to 4 filters/ polarizers (1" diameter), optional piezoelectric rotator with filter mount

pinhole configuration

two pinholes (fiber apertures), different illumination and collection wavelength possible

pinhole size

dependent on fibers, typically 3 .. 9 µm mode field diameter

LT- compatible objective

LT-APO/VIS, LT-APO/VISIR, LT-APO/NIR(see accessory section for more information)

inspection unit

sample imaging with large field of view


excitation wavelength range

400 .. 1000 nm, default 650 nm (others on request)

illumination port specification

FC/ APC-connector for single mode fibers or free-beam configuration


detection mode

e.g. optically detected magnetic resonance (ODMR), luminescence, fluorescence

detection port specification

FC/ APC-connector for single mode fibers or free-beam configuration

Sample Positioning

total travel range

independent degrees of freedom for tip and sample of 2 mm x 3 mm x 2.5 mm (closed loop)

step size

0.05..3 µm @ 300 K, 10..500 nm @ 4 K

fine scan range

50 x 50 x 4.2 µm³ @ 300 K, 30 x 30 x 2 µm³ @ 4 K

closed loop scanning


sample holder

ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts, integrated heater with calibrated temperature sensor

Suitable Operating Conditions

temperature range

1.5 K..300 K (dependent on cryostat); mK compatible setup available on request

magnetic field range

0..15 T+ (dependent on magnet)

operating pressure

designed for He exchange gas (vacuum compatible version down to 1E-6 mbar on request)

Suitable Cooling Systems

titanium housing diameter

48 mm

bore size requirement

designed for a 2" (50.8 mm) cryostat/magnet bore

compatible cryostats

attoDRY1000/1100/2100, attoLIQUID1000/2000/3000/5000

Compatibility with Electronics

scan controller and software

ASC500 (for detailed specifications please see attoCONTROL section)

Options and Upgrades

closed loop scanning & global sample coordinates

interferometric encoders for scan linearization and closed loop sample navigation

ultra-large scan range upgrade

125 x 125 µm² @ 4 K

in-situ inspection optics

tip/sample monitoring via in-situ LT-LED for illumination, mirrors, lenses and CCD camera (outside of cryostat)

closed loop upgrade for coarse positioners

resistive encoder, range 5 mm, sensor resolution approx. 200 nm, repeatability 1-2 µm

sample holder upgrade

ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts and integrated heater with calibrated temperature sensor