General Specifications

type of instrument

cantilever based AFM with interferometric deflection detection

sensor head specifics

attoAFM I+ head feat. alignment-free cantilever holder, tip exchange in less than 2 minutes

alignment-free cantilever holder (default)

compatible with PointProbe® Plus XY-Alignment Series by Nanosensors

conventional cantilever holder (optional)

compatible with standard commercial cantilevers

Operation Modes

imaging modes

contact mode, non-contact mode, constant height, constant force

slope compensation

2 axis scan plane correction

z feedback

PI feedback loop for amplitude modulation (AM), phase modulation (PM) or frequency modulation (FM) using included PLL

incl. standard techniques


optional upgrades

MFM, KPFM, PFM, conductive-tip AFM


measured RMS z-noise (constant force @ 4 K, 5 ms pixel time)

< 0.05 nm (expected for attoLIQUID), < 0.10 nm (expected for attoDRY), < 0.15 nm (guaranteed)

z deflection noise density

< 3 pm/vHz (dependent on laser system)

lateral magnetic resolution

< 20 nm (attoLIQUID), < 50 nm (attoDRY)

z bit resolution @ 4 K

57 pm at 15 µm scan range

Sample Positioning

total travel range

5 x 5 x 5 mm³ (open loop)

step size

0.05..3 µm @ 300 K, 10..500 nm @ 4 K

fine scan range

50 x 50 x 24 µm³ @ 300 K, 30 x 30 x 15 µm³ @ 4 K

closed loop scanning


sample holder

ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts

Suitable Operating Conditions

temperature range

1.5 K..300 K (dependent on cryostat); mK compatible setup available on request

magnetic field range

0..15 T+ (dependent on magnet)

operating pressure

designed for He exchange gas (vacuum compatible version down to 1E-6 mbar on request)

Suitable Cooling Systems

titanium housing diameter

48 mm

bore size requirement

designed for a 2" (50.8 mm) cryostat/magnet bore

compatible cryostats

attoDRY1000/1100/2100, attoLIQUID1000/2000/3000/5000

Compatibility with Electronics

scan controller and software

ASC500 (for detailed specifications please see attoCONTROL section)


LDM1300 laser/detector module (for detailed specifications please see attoCONTROL section)

Options and Upgrades

closed loop scanning & global sample coordinates

interferometric encoders for scan linearization and closed loop sample navigation

ultra-large scan range upgrade

80 x 80 µm² @ 300 K, 125 x 125 µm² @ 4 K

in-situ inspection optics

tip/sample monitoring via in-situ LT-LED for illumination, mirrors, lenses and CCD camera (outside of cryostat), field of view approx. 3 mm x 2 mm, resolution approx. 20

closed loop upgrade for coarse positioners

resistive encoder, range 5 mm, sensor resolution approx. 200 nm, repeatability 1-2 µm

additional AFM head with manual alignment

conventional cantilever holder, compatible with standard commercial cantilevers