- introduction
- measurement system vs. machine sensor
- sensor heads overview & working distances
- sensor head specifications
- targets & materials
- glossary
- loan service
- PTB calibration
attoSENSORICS
Ultra Precision Sensors
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attocube’s SENSORICS team is devoted to the development of cutting-edge sensor solutions for the most challenging applications in research and industry. The innovative optical displacement sensors of the FPS and IDS series* surpass the performance of other presently available devices in terms of precision, speed, and compactness. The patented fiber-based, interferometric measurement principle offers unrivalled accuracy and stability, while the compact design enables strikingly simple adjustment even in spatially confined setups. Fiber-based sensor heads enable the operation in extreme environments, such as ultra high vacuum, cryogenic temperatures, or even hard radiation.
* FPS (Fabry-Pérot Sensor) | IDS (Industrial Displacement Sensor)
Two product lines have been established and adapted to perfectly meet existing market demands: FPS Sensors offer integrated measurement and analysis capabilities, providing immediate availability of data post-processing, analysis, and storage. IDS Sensors are designed for machine integration and seamless connection to common industrial networks. The integrated webserver and the IDS’ compatibility with various field busses complies with industry 4.0 standards.
The Sensorics Solutions section provides an overview of various customized interferometry solutions and OEM products. Used as a stand-alone component or in combination with attocube’s motion solutions, FPS and IDS devices open up new applications and combine exceptional performance with highest compactness.
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CUSTOMER FEEDBACK |
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The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.
(Institute for Aerospace Engineering, Dresden University of Technology, Germany) |
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CUSTOMER FEEDBACK |
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Due to the fast adjustment and precise sub-nanometer resolution of the sensor, we are able to easily identify trajectories and eigen frequencies for the optimization of flexure based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of this year, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20nm within the beginning of 2016. (DESY/suna-precision GmbH, Hamburg, Germany) |
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CUSTOMER FEEDBACK |
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The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions. (Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany) |
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CUSTOMER FEEDBACK |
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An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology. (Synchrotron Soleil St. Aubin, France) |
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CUSTOMER FEEDBACK |
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Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.
(CERN / Magnetic Measurement Section, Geneva, Switzerland) |
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Measurement System vs. Machine Sensor
applicational range of FPS/IDS devices
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With its USB interfacing and advanced measurement software, the FPS system is the perfect choice for contactless, ultra-high precision displacement measurements with immediate data inspection. Typical fields of applications range from quality assurance to R&D.
In contrast, the IDS is ideally suited for all applications where real-time position information is required, such as in closed-loop position feedbacks or active vibration compensation. A list of suitable applications for attocube’s sensor products can be found below.
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Sensor Head Overview
IDS & FPS
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The IDS and FPS can be operated with different sensor heads:
ultra compact heads for the most confined spaces or alternative designs where priority is given to easy alignment or to the compatibility with various target materials (glass, aluminum, ceramic, etc.).
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Ø 14 mm, length 43.9 mm |
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Ø 22 mm, length 22.7 mm |
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Ø 14 mm, length 19.5 mm |
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Ø 4 mm, length 11.5 mm |
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Ø 12 mm, length 32.3 mm |
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| *FPSH: 0..2000mm; IDSH: 0..5000mm 1By using special sensor heads, the IDS can realize measurement distances of up to 30 meters. |
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IDS & FPS Sensor Heads
specifications
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| Sensor Heads | |||||
| product name | D12/F2.8 | D4/F17 | M12/F40 | M15.5/F40/FLEX | M12/C7.6 |
| Modes of Operation | |||||
| optics type | focusing | collimating | |||
| dimensions | Ø 12 mm, length 32.3 mm |
Ø 4 mm, length 11.5 mm |
Ø 14 mm, length 17.4 mm |
Ø 22 mm, length 20.6 mm |
Ø 14 mm, length 49.2 mm |
| mounting | clamped | clamped | metric M12 x 0.5 | metric M15.5 x 0.5 | metric M12 x 0.5 |
| focal length | 2.8 mm | 17 mm | 40 mm | 40 mm | infinity |
| connector | FC/PC | fiber glued | FC/PC | FC/PC | FC/PC |
| working environment | /RT,/LT/HV,/UHV,/RAD | ||||
| benefits | short distance and wide angle | lower surface quality | broad variety of applications | easy to mount and easy to align | long distances and working ranges |
| exemplary applications | vibrometry and profilometry of various geometrical shapes |
deformation monitoring of work pieces during manufacturing |
concentricity tests, detection of imbalances | monitoring and diagnostics of machine tools components |
calibration and synchronization of large-scale machine tools or coordinate measurement machines |
| Measurement Specifications | |||||
| working range (target: glass) | 2.8 mm ± 4 μm | 14.5..19.5 mm | 38.5..41.5 mm | 38.5..41.5 mm | - |
| alignment tolerance (target: glass) |
± 4 ° | ± 0.15° | ± 0.35° | ±0.35° | - |
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working range |
2.8 mm ± 20 μm | 50..65 mm | 46..50 mm | 46..50 mm | - |
| alignment tolerance (target: mirror) |
± 10° | ± 0.2° | ± 0.35° | ± 0.35° | - |
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working range |
- | - | - | - | up to 5000 mm |
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alignment tolerance |
- | - | - | - | ± 15° |
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lateral alignment tolerance |
- | - | - | - | ± 2 mm |
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Compatible environements |
Naming Scheme |
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/RT (ambient conditions): |
0 .. 100 °C, 1x10-4 mbar .. 10 bar |
F40: |
focusing head with 40 mm focal length |
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Optical Targets and Materialsmeasurements down to 4% surface reflectivity |
The FPS & IDS sensors are compatible with a variety of targets, target materials, and technical surfaces
(such as drive shafts, end mills etc.). Most frequently, plane mirrors are being used in constrained (uniaxial) or xy-measurement applications (bi-axial).
For long range sensing applications with reduced requiremets on alignment, retroreflectors are most typically used. Depending on sensor head type and sensor-target separation, the alignment tolerances range from 0.1° (glass, single pass) up to several degrees (retroreflectors). Please contact info@attocube.com for further details.
Glossary
attoSENSORICS technical terms
Fabry-Pérot Interferometer
Our FPS and IDS Sensor Systems are based on a low-finesse fiber-based Fabry-Pérot Interferometer. A great advantage of this technology over other displacement sensing techniques is their electronic-free sensor heads. The physical dimension of the sensor head is reduced to the millimeter range. This miniaturization makes the sensor ultra-compact and also compatible with extreme environments such as ultra high vacuum and low temperature.
The fiber-based design allows flexible alignment, thus making multi-axis measurements and large distances of fiber length (even covering kilometer long distances) an easy task.
Environmental Compensation Unit (ECU)
The ECU provides a fully automated refractive index compensation for contactless interferometric measurements at ambient conditions. Variations in air pressure, temperature, and humidity are recorded and used to automatically compensate for changes in the refractive index.
Focusing Sensor Head
The focusing sensor heads D1.2/F20 (sensor head diameter of 1.2 mm with a focal length of 20 mm), D4/F17, M12/F40, and D12/F2.8 are suitable to measure on a wide range of target materials as well as target surface qualities with low, medium, or high surface reflectivity. For example, the focusing sensor heads make it possible to measure on a BK7 glass object with a reflectivity of only 4 %. The sensor head M15.5/F40 includes a flexure structure to adjust the beam path angle with ±1°.
Collimating Sensor Head
The sensor head M12/C7.6 (sensor head with a M12 metric thread and a beam diameter of 7.6 mm) is suited with a collimating optics type especially designed for the use with retroreflectors. It is optimized to measure over longer distances.
Working Distance
Distance between the front side of the sensor head and the target where a continuous measurement is possible.
Absolute Distance
Distance between the end of fiber, which is represented by the mechanical stop, and the target.
Focal Length
The focal length F is the distance between the front side of the sensor head and the focal point.
Alignment Tolerance
The angular alignment tolerance represents the target‘s tilt range in respect to the laser beam. It must be considered that the laser beam might not be parallel to the central axis of the sensor head. At retroreflectors, the center of roration is in the center of the retroreflector.
Loan Service for IDS
testing the interferometer under real conditions
attocube’s laser interferometer is suitable for a broad field of applications. Since each application case has its own constraints and interfaces, the real benefits of the IDS appear when it is used under real conditions.
For checking the applicability and performance of the laserinterferometers, attocube offers a loan service for testing them. This allows to use the interferometer under real conditions and to estimate its benefits and accuracy.
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IDS including accessories (e.g. power supply) |
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Enviromental Compensation Unit (ECU) |
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Selection of collimating and focusing sensor heads for ambient conditions |
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Mounting Kits for aligning the sensor head |
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Optical items: glass target, plane mirror, and retroreflector |
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Fiber cleaning tool |
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CUSTOMER FEEDBACK |
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Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.
(CERN / Magnetic Measurement Section, Geneva, Switzerland) |
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• Loan Period The loan service allows to use and test the interferometer for up to 2 weeks.
• Data for Installation/Integration All documents, software and DLLs for using and integrating the device into the environment are provided with the loan package.
• Expert Consulting for Installation Our experienced team supports the whole process of installation and integration and provides advice for your projects.
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PTB-Certification for Interferometers
highest accuracy over long distances
attocube’s interferometers IDS and FPS have been tested by the National Metrology Institute of Germany (PTB). The accuracy of the interferometers has been confirmed at various pressure, humidity and temperature conditions over several days, thus also confirming the high performance and reliability of attocube’s ECU (environmental compensation unit).
The IDS was checked over a working distance of 10 meters. The systematic error of measurement was quantified to 0.0 ppm between a working distance of 0 m and 3 m. The total expanded measurement uncertainty (k=2), consisting of the systematic and random measurement errors mostly remains under 0.4 ppm.
