Displacement Sensing for Industry & Synchotron
Some of the most important tasks in industrial metrology applications are contactless measurements of distances and displacements, the detection of vibration amplitudes of machine components and tools, and the ultra-precise survey of rotationally symmetric parts. Fields of application are extremely versatile and range from ultra-precision machining to semiconductor technology.
Requirements on accuracy, flexibility, and interconnectivity are constantly increasing and ask for ever more sophisticated solutions. These solutions are supposed to combine highest precision, speed, and reliability - while providing remote access and software maintenance from virtually anywhere on the planet. attocube’s IDS3010 sensor has been specifically designed for challenging OEM and synchrotron applications and fulfills future requirements on precision already today.
The built-in DFB laser of the IDS is locked to a molecular absorption frequency reference, making the detected displacement traceable to international length standards. All measurements are therefore truly accurate in a metrological sense.
Optional radiation-hard sensor heads and fiber packages are available for the operation in radiation harsh environments. All radiation-hard (/RAD) components are qualified for radiation doses of up to 10 MGy.
All IDS sensors measure the position of the target with a bandwidth of 10 MHz and a resolution of 1 pm. At the same time, the sensor is compatible with displacement velocities of up to 2 m/s.
Multi axis operation up to 5m
The IDS offers three measurement axes which operate simultaneously, enabling tracking target displacements in three degrees of freedom over dynamic travel ranges of up to 5 m.
Due to its compact size (50mm x 55mm x 195mm) and its passively cooled housing, IDS sensors can be directly integrated into milling machines, coordinate measurement machines, and semicon equipment. Adapter plates enable the integration into electric control cabinets.
IDS sensors can be equipped with an optional environmental compensation unit (ECU). The ECU enables the operation of IDS sensors at ambient conditions while maintaining an accuracy guaranteed ± 1ppm (up to 5 m) and expected ± 0 ppm (up to 4.2 m) under a wide range of pressure, temperature, and humidity values.
IDS sensors are compatible with a multitude of interfaces. As standard interfacing, IDS sensors provide real-time digital (HSSL, AquadB) and analog (sin/cos, linear) position data. Alternatively, the IDS can optionally be upgraded with BiSS-C. In addition, IDS devices interface with field busses such as CANopen, Profibus, Profibus RT, and EtherCAT (on request).
VIS alignment laser
All IDS sensors are equipped with an integrated visible alignment laser (650 nm). The alignment laser can be software enabled during mechanical installation of the sensor, greatly reducing setup duration. An alignment software tool simplifies the process further.