Sensor Head M15.5/F40/FLEX




The sensor kit package M15.5/F40 is available for FPS and IDS sensors, and contains a M15.5/F40/FLEX sensor head, a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller and an aluminum coated mirror as target. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



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Download_Specs.png download specs FPSH