Sensor Head M15.5/C1.6/FLEX

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The sensor kit package M15.5/C1.6 is available for FPS and IDS sensors, and contains a M15.5/C1.6/FLEX sensor head, a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller and an aluminum coated mirror as target. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



 

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M15.5/C1.6/FLEX - Technical Specifications
optics type collimating
dimensions Ø 22 mm, length 20.6 mm
mounting metric M15.5 x 0.5
spot size 1.6 mm
focal length
connector FC/PC
working environment /RT, /HV,/LT,/UHV,/RAD
Targets
glass
measurement mode single pass mode
linear measurement range 0..1000 mm
alignment tolerance ± 0.04°
mirror
measurement mode dual pass mode
linear measurement range 0..1000 mm
alignment tolerance ± 0.05° @ 50 mm
 
 
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Article

Art. No.

RT

FPSH/M15.5/C1.6/FLEX/RT

1007752

IDSH/M15.5/C1.6/FLEX/RT

1010631

LT/HV
FPSH/M15.5/C1.6/FLEX/LT/HV 1007753
IDSH/M15.5/C1.6/FLEX/LT/HV 1010632
UHV
FPSH/M15.5/C1.6/FLEX/UHV 1007754
IDSH/M15.5/C1.6/FLEX/UHV 1010634
RAD
FPSH/M15.5/C1.6/FLEX/RAD 1010144
IDSH/M15.5/C1.6/FLEX/RAD 1010636