Sensor Head M12/C1.6

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The sensor kit package M12/C1.6 is available for FPS and IDS sensors, and contains a M12/C1.6 sensor head, a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller and an aluminum coated mirror as target. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



 

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M12/C1.6 - Technical Specifications
optics type collimating
dimensions Ø 14 mm, length 17.4 mm
mounting metric M12 x 0.5
spot size 1.6 mm
focal length
connector FC/PC
working environment /RT, /HV,/LT,/UHV,/RAD
Targets
glass
measurement mode single pass mode
linear measurement range 0..1000 mm
alignment tolerance ± 0.04°
mirror
measurement mode dual pass mode
linear measurement range 0..1000 mm
alignment tolerance ± 0.05° @ 50 mm
 
 
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Article

Art. No.

RT

FPSH/M12/C1.6/RT

1007571

IDSH/M12/C1.6/RT

1010301

LT/HV
FPSH/M12/C1.6/LT/HV 1007188
IDSH/M12/C1.6/LT/HV 1010303
UHV
FPSH/M12/C1.6/UHV 1007190
IDSH/M12/C1.6/UHV 1010305
RAD
FPSH/M12/C1.6/RAD 1008985
IDSH/M12/C1.6/RAD 1010638