Sensor Head D4/F8

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The sensor kit package D4/F8 is available for FPS and IDS sensors, and contains a D4/F8 sensor head, a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller and an aluminum coated mirror as target. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



 

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D4/F8 - Technical Specifications
optics type focussing
dimensions Ø 4 mm, length 11.5 mm
mounting clamped
spot size 70 µm @ 8mm
focal length 8 mm
connector none (fiber glued)
working environment /RT, /HV,/LT,/UHV,/RAD
Targets
glass
measurement mode single pass mode
linear measurement range 6..10 mm
alignment tolerance ± 0.35°
mirror
measurement mode single pass mode
linear measurement range 15..30 mm
alignment tolerance ± 0.35°

 

 
 
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Article

Art. No.

RT

FPSH/D4/F8/RT

1009939

IDSH/D4/F8/RT

1010307

LT/HV
FPSH/D4/F8/LT/HV 1009943
IDSH/D4/F8/LT/HV 1010640
UHV
FPSH/D4/F8/UHV 1009947
IDSH/D4/F8/UHV 1010644
RAD
FPSH/D4/F8/RAD 1010146
IDSH/D4/F8/RAD 1010649