Sensor Head D4/F13

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The sensor kit package D4/F13 is available for FPS and IDS sensors, and contains a D4/F13 sensor head, a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller and an aluminum coated mirror as target. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



 

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D4/F13 - Technical Specifications
optics type focussing
dimensions Ø 4 mm, length 11.5 mm
mounting clamped
spot size 70µm @ 13 mm
focal length 13 mm
connector none (fiber glued)
working environment /RT, /HV,/LT,/UHV,/RAD
Targets
glass
measurement mode single pass mode
linear measurement range 11..15 mm
alignment tolerance ± 0.35°
mirror
measurement mode single pass mode
linear measurement range 30..45 mm
alignment tolerance ± 0.35°
 
 
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Article

Art. No.

RT

FPSH/D4/F13/RT

1009940

IDSH/D4/F13/RT

1010308

LT/HV
FPSH/D4/F13/LT/HV 1009944
IDSH/D4/F13/LT/HV 1010641
UHV
FPSH/D4/F13/UHV 1009948
IDSH/D4/F13/UHV 1010645
RAD
FPSH/D4/F13/RAD 1010147
IDSH/D4/F13/RAD 1010650