Sensor Head D12/F2.8

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The sensor kit package D12/F2.8 is available for FPS and IDS sensors, and contains a D12/F2.8 sensor head and a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV). Feedthroughs and other targets (e.g. retroreflectors) are optional.



 

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D12/F2.8 - Technical Specifications
optics type focussing
dimensions Ø 12 mm, length 32.3 mm
mounting clamped
spot size 2 µm @ 2.8 mm
focal length 2.8 mm
connector FC/PC
working environment /RT, /LT/HV, /UHV, /RAD
Targets
glass
measurement mode single pass mode
linear measurement range 2.8 mm
 
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Article

Art. No.

RT

FPSH/D12/F2.8/RT

1011400

IDSH/D12/F2.8/RT

1011404

LT/HV

FPSH/D12/F2.8/LT/HV

1011401

IDSH/D12/F2.8/LT/HV

1011405

UHV

FPSH/D12/F2.8/UHV

1011402

IDSH/D12/F2.8/UHV

1011406

RAD

FPSH/D12/F2.8/RAD

1011403

IDSH/D12/F2.8/RAD

1011407